Investigation on the Mechanism of Millisecond Solid Phase Crystallization of Silicon Films Formed by Micro-Thermal-Plasma-Jet and Their Application to Bottom-Gate Thin Film Transistors

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Title ( eng )
Investigation on the Mechanism of Millisecond Solid Phase Crystallization of Silicon Films Formed by Micro-Thermal-Plasma-Jet and Their Application to Bottom-Gate Thin Film Transistors
Title ( jpn )
大気圧マイクロ熱プラズマジェット照射によるシリコン薄膜のミリ秒結晶化メカニズムの解明とボトムゲート型薄膜トランジスタへの応用
Creator
Nguyen Hoa Thi Khanh
Language
eng
Resource Type doctoral thesis
Publish Type Not Applicable (or Unknown)
Access Rights open access
Dissertation Number 甲第8673号
Degree Name
Date of Granted 2021-09-17
Degree Grantors
広島大学