Investigation on thin-film polycrystalline silicon for solar cells by a new solid phase crystallization method

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Title ( eng )
Investigation on thin-film polycrystalline silicon for solar cells by a new solid phase crystallization method
Title ( jpn )
新しい固相成長法による太陽電池用薄膜多結晶シリコンに関する研究
Creator
Matsuyama Takao
Descriptions
1 Introduction / p1
 1.1 History of solar cells / p1
 1.2 Conventional fabrication method of thin-film polycrystalline silicon for solar cells / p2
 1.3 Solid phase crystallization method / p6
 1.4 A new solid phase crystallization (SPC) method / p8
 References / p12
2 Theoretical background / p14
 2.1 Introduction / p14
 2.2 Solid phase crystallization / p15
 2.3 Transport of polycrystalline silicon films / p18
 2.4 Current-voltage characteristics of p-n junction / p21
 2.5 Summary / p26
 References / p27
3 Development of thin-film polycrystalline silicon by a new SPC method / p28
 3.1 Introduction / p28
 3.2 Effect of impurities (dopants) / p33
 3.3 Optimum starting materials for the SPC method / p66
 3.4 Investigation of substrates / p83
 3.5 Solid phase crystallization using crystal silicon as a seed / p97
 3.6 Summary / p108
 References / p110
4 Development of solar cells using thin-film polycrystalline silicon / p111
 4.1 Introduction / p111
 4.2 Experimental technique / p112
 4.3 A new junction fabrication technology / p116
 4.4 Solar cells using thin-film polycrystalline silicon fabricated by the SPC method / p136
 4.5 Summary / p147
 References / p149
5.Summary / p150
Acknowledgement / p153
NDC
Chemical technology [ 570 ]
Language
eng
Resource Type doctoral thesis
Rights
Copyright(c) by Author
Publish Type Not Applicable (or Unknown)
Access Rights open access
Dissertation Number 乙第2526号
Degree Name
Date of Granted 1994-02-10
Degree Grantors
広島大学