蛍光X線ホログラフィー <解説>
放射光 Volume 11 Issue 5
Page 361-367
published_at 1998-11-30
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| File | |
| Title ( jpn ) |
蛍光X線ホログラフィー <解説>
|
| Title ( eng ) |
X-ray Fluorescence Holography
|
| Creator |
Hayashi Kouichi
Kawai Jun
Hayakawa Shinjiro
Goto Shunji
Nihei Yoshimasa
Gohshi Yohichi
|
| Source Title |
放射光
|
| Volume | 11 |
| Issue | 5 |
| Start Page | 361 |
| End Page | 367 |
| Abstract |
The X-ray fluorescence holography makes it possible to obtain direct three-dimensional atomic images around atoms emitting fluorescent X-rays. We describe here the history and theory of the X-ray fluorescence holography and show our experimental results. Using synchrotron radiation, we succeeded to measure the hologram of dopant in semiconductor wafer for 9 hours.
|
| NDC |
Chemistry [ 430 ]
|
| Language |
jpn
|
| Resource Type | journal article |
| Publisher |
日本放射光学会
|
| Date of Issued | 1998-11-30 |
| Rights |
Copyright (c) 1998 The Japanese Society for Synchrotron Radiation Research
|
| Publish Type | Version of Record |
| Access Rights | open access |
| Source Identifier |
[ISSN] 0914-9287
[NCID] AN10075706
|
