Tunneling Acoustic Microscope
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| File | |
| Title ( eng ) |
Tunneling Acoustic Microscope
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| Title ( jpn ) |
トンネル音響顕微鏡
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| Creator |
Tanaka Keiji
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| Abstract |
This paper describes a new type of acoustic microscope based upon a scanning tunneling microscope (STM). This is an STM with an acoustic sensor that obtains physical information from an acoustic wave as well as the tunneling current. Interactions capable of generating strains in the STM sample are detectable and are used to image sample properties. This enhances STM's capabilities without reducing its ability, and enables imaging of nonconducting materials and imaging of dielectric and piezoelectric properties.
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| Descriptions |
Abstract / p2
Contents / p3 1.Introduction / p4 2.Principle / p7 2.1 Surface Force / p9 2.2 Electrostatic Force / p10 2.3 Piezoelectric Effect / p12 3.Instrumentation / p14 3.1 Configuration / p14 3.2 Ultrasonic Motor for Tip Approach System / p16 3.3 Charge Control / p18 4.Experimental Results and Discussion / p20 4.1 Surface Force Detection / p20 4.2 Electrostatic Force Detection / p21 4.3 Surface Contour / p22 4.4 Defects Induced by Thermal Oxidation / p22 4.5 Ion-Implanted Silicon / p25 4.6 Contact Hole / p31 4.7 Piezoelectric Thin Film / p34 5.Conclusion / p40 Acknowledgements / p41 |
| NDC |
Electrical engineering [ 540 ]
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| Language |
eng
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| Resource Type | doctoral thesis |
| Rights |
Copyright(c) by Author
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| Publish Type | Not Applicable (or Unknown) |
| Access Rights | open access |
| Source Identifier |
[1] Tunneling acoustic microscope. K. Takata, T. Hasegawa, S. Hosaka, S. Hosoki, and T. Komoda. Applied Physics Letters, Vol. 55, No. 17 (1989) pp. 1718-1720.
references
[2] Tunneling Acoustic Microscope. K. Takata, J. Yugami, T. Hasegawa, S. Hosaka, S. Hosoki, and T. Komoda. Japanese Journal of Applied Physics, Vol. 28, No. 12 (1989) pp. L2279-L2280.
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[3] Electrostatic Force Imaging by Tunneling Acoustic Microscopy. K. Takata, T. Okawa, and M. Horiuchi. Japanese Journal of Applied Physics, Vol. 30, No. 2B (1991) pp. L309-L312.
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[4] Observation of deep contact holes and conductive components underlying insulator in a memory cell by tunneling acoustic microscopy. K. Takata, T. Kure, and T. Okawa. Applied Physics Letters, Vol. 60, No. 4 (1992) pp. 515-517.
references
[5] Strain Imaging of Lead-Zirconate-Titanate Thin Film by Tunneling Acoustic Microscopy. K. Takata, K. Kushida, K. Torii, and H. Miki. Japanese Journal of Applied Physics, Vol. 33, No. 5B (1994) pp. 3193-3196.
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[DOI] http://dx.doi.org/10.1063/1.102199
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[DOI] http://dx.doi.org/10.1143/JJAP.28.L2279
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[DOI] http://dx.doi.org/10.1143/JJAP.30.L309
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[DOI] http://dx.doi.org/10.1063/1.106594
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[DOI] http://dx.doi.org/10.1143/JJAP.33.3193
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| Dissertation Number | 乙第2604号 |
| Degree Name | |
| Date of Granted | 1994-09-22 |
| Degree Grantors |
広島大学
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