ID 31853
本文ファイル
別タイトル
トンネル音響顕微鏡
著者
高田 啓二
NDC
電気工学
抄録(英)
This paper describes a new type of acoustic microscope based upon a scanning tunneling microscope (STM). This is an STM with an acoustic sensor that obtains physical information from an acoustic wave as well as the tunneling current. Interactions capable of generating strains in the STM sample are detectable and are used to image sample properties. This enhances STM's capabilities without reducing its ability, and enables imaging of nonconducting materials and imaging of dielectric and piezoelectric properties.
目次
Abstract / p2
Contents / p3
1.Introduction / p4
2.Principle / p7
 2.1 Surface Force / p9
 2.2 Electrostatic Force / p10
 2.3 Piezoelectric Effect / p12
3.Instrumentation / p14
 3.1 Configuration / p14
 3.2 Ultrasonic Motor for Tip Approach System / p16
 3.3 Charge Control / p18
4.Experimental Results and Discussion / p20
 4.1 Surface Force Detection / p20
 4.2 Electrostatic Force Detection / p21
 4.3 Surface Contour / p22
 4.4 Defects Induced by Thermal Oxidation / p22
 4.5 Ion-Implanted Silicon / p25
 4.6 Contact Hole / p31
 4.7 Piezoelectric Thin Film / p34
5.Conclusion / p40
Acknowledgements / p41
SelfDOI
言語
英語
NII資源タイプ
学位論文
広大資料タイプ
学位論文
DCMIタイプ
text
フォーマット
application/pdf
著者版フラグ
ETD
権利情報
Copyright(c) by Author
関連情報(references)
[1] Tunneling acoustic microscope. K. Takata, T. Hasegawa, S. Hosaka, S. Hosoki, and T. Komoda. Applied Physics Letters, Vol. 55, No. 17 (1989) pp. 1718-1720.
[2] Tunneling Acoustic Microscope. K. Takata, J. Yugami, T. Hasegawa, S. Hosaka, S. Hosoki, and T. Komoda. Japanese Journal of Applied Physics, Vol. 28, No. 12 (1989) pp. L2279-L2280.
[3] Electrostatic Force Imaging by Tunneling Acoustic Microscopy. K. Takata, T. Okawa, and M. Horiuchi. Japanese Journal of Applied Physics, Vol. 30, No. 2B (1991) pp. L309-L312.
[4] Observation of deep contact holes and conductive components underlying insulator in a memory cell by tunneling acoustic microscopy. K. Takata, T. Kure, and T. Okawa. Applied Physics Letters, Vol. 60, No. 4 (1992) pp. 515-517.
[5] Strain Imaging of Lead-Zirconate-Titanate Thin Film by Tunneling Acoustic Microscopy. K. Takata, K. Kushida, K. Torii, and H. Miki. Japanese Journal of Applied Physics, Vol. 33, No. 5B (1994) pp. 3193-3196.
関連情報URL(references)
http://dx.doi.org/10.1063/1.102199
http://dx.doi.org/10.1143/JJAP.28.L2279
http://dx.doi.org/10.1143/JJAP.30.L309
http://dx.doi.org/10.1063/1.106594
http://dx.doi.org/10.1143/JJAP.33.3193
学位記番号
乙第2604号
授与大学
広島大学(Hiroshima University)
学位名
博士(理学)
学位名の英名
Physical Science
学位の種類の英名
doctoral
学位授与年月日
1994-09-22
部局名
理学研究科