Monolithically integrated optical modulator based on polycrystalline Ba0.7Sr0.3TiO3 thin films
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ID | 18592 |
本文ファイル | |
著者 |
Xu, Zhimou
Suzuki, Masato
Tanushi, Yuichiro
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抄録(英) | Good-quality polycrystalline Ba0.7Sr0.3TiO3 (BST0.7) thin films were deposited on fused silica substrates and Si substrates having a thick amorphous SiO2 layer at a relatively low temperature of 550 °C by spin-coating metal organic solutions. The thin films were highly transparent to light in the ultraviolet to near-infrared wavelength regions. The optical propagation loss for a 5-μm-wide and 300-nm-thick polycrystalline waveguide based on BST0.7 was about 17 dB/cm at a wavelength of 632.8 nm. An electro-optic Mach-Zehnder interferometer modulator based on the polycrystalline BST0.7 thin film was monolithically integrated on a Si substrate with standard lithography and wet etching. Optical modulation was successfully demonstrated. The estimated electro-optic coefficient (6.7 pm/V) is the highest reported so far for this kind of film deposited on a fused silica substrate or a Si substrate with an amorphous SiO2 layer.
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掲載誌名 |
Applied Physics Letters
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巻 | 88巻
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号 | 17号
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出版年月日 | 2006-04-17
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出版者 | American Institute of Physics
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ISSN | 0003-6951
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NCID | |
出版者DOI | |
言語 |
英語
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NII資源タイプ |
学術雑誌論文
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広大資料タイプ |
学術雑誌論文
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DCMIタイプ | text
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フォーマット | application/pdf
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著者版フラグ | publisher
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権利情報 | Copyright (c) 2006 American Institute of Physics.
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関連情報URL | |
部局名 |
ナノデバイス・システム研究センター
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