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ID 51509
本文ファイル
著者
Ushiki, Ikuo 大学院先進理工系科学研究科 広大研究者総覧
Fujimitsu, Ryo
Takishima, Shigeki 大学院先進理工系科学研究科 広大研究者総覧
キーワード
Solubility
Supercritical carbon dioxide
PC-SAFT (perturbed-chain statistical associating fluid theory)
Metal acetylacetonate
Prediction
Deposition
抄録(英)
Solubilities of metal precursors in supercritical carbon dioxide (scCO2) are needed to effectively design the scCO2-based deposition method. Herein, a method for predicting the solubilities of metal acetylacetonate (acac) precursors in scCO2 was developed using the perturbed-chain statistical associating fluid theory (PC-SAFT) equation of state. Three PC-SAFT pure-component parameters viz., the segment diameter, segment number, and dispersion energy, for two metal acetylacetonates (Cr(acac)3 and Cu(acac)2) were determined by adjusting their values to the measured solubilities in organic solvents. The PC-SAFT parameters of Cr(acac)3 and Cu(acac)2 were then applied to predict the experimentally determined metal precursor solubilities in scCO2 from the literature. The PC-SAFT predictions accurately described the experimental solubilities in scCO2 over a wide range of pressures and temperatures even if the binary interaction parameter kij was set to 0. The isobaric solubilities in scCO2 were also calculated with the generalized kij values, which provided a successful PC-SAFT description.
内容記述
This work was supported by a JSPS (Japan Society for the Promotion of Science)KAKENHI Grant-in-Aid for Scientific Research [grant number 18K14045].
掲載誌名
The Journal of Supercritical Fluids
164巻
開始ページ
104909
出版年月日
2020-10-01
出版者
Elsevier
ISSN
0896-8446
出版者DOI
言語
英語
NII資源タイプ
学術雑誌論文
広大資料タイプ
学術雑誌論文
DCMIタイプ
text
フォーマット
application/pdf
著者版フラグ
author
権利情報
© 2020. This manuscript version is made available under the CC-BY-NC-ND 4.0 license http://creativecommons.org/licenses/by-nc-nd/4.0/
This is not the published version. Please cite only the published version. この論文は出版社版ではありません。引用の際には出版社版をご確認、ご利用ください。
関連情報URL
部局名
先進理工系科学研究科
備考
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