(100) Oriented Poly-Si Thin Film Formation and Ultrahigh-Performance Poly-Si Thin Film Transistors Fabrication with Multi-Line Beam Continuous-Wave Laser Lateral Crystallization
Use this link to cite this item : https://ir.lib.hiroshima-u.ac.jp/00046126
| ID | 46126 |
| file | |
| title alternative | マルチライン連続発振レーザ・ラテラル結晶化による(100)面方位制御多結晶シリコン薄膜形成と高性能多結晶シリコン薄膜トランジスタの作製
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| creator |
Nguyen, Thi Thuy
|
| language |
eng
|
| nii type |
Thesis or Dissertation
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| HU type |
Doctoral Theses
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| DCMI type | text
|
| format | application/pdf
|
| text version | ETD
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| grantid | 甲第7543号
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| degreeGrantor | 広島大学(Hiroshima University)
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| degreename Ja | 博士(理学)
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| degreename En | Doctor of Science
|
| degreelevel | doctoral
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| date of granted | 2018-03-23
|
| department |
Graduate School of Advanced Sciences of Matter
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