Tunneling Acoustic Microscope
Use this link to cite this item : http://doi.org/10.11501/3105947
| ID | 31853 |
| file | |
| title alternative | トンネル音響顕微鏡
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| creator |
Tanaka, Keiji
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| NDC |
Electrical engineering
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| abstract | This paper describes a new type of acoustic microscope based upon a scanning tunneling microscope (STM). This is an STM with an acoustic sensor that obtains physical information from an acoustic wave as well as the tunneling current. Interactions capable of generating strains in the STM sample are detectable and are used to image sample properties. This enhances STM's capabilities without reducing its ability, and enables imaging of nonconducting materials and imaging of dielectric and piezoelectric properties.
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| contents | Abstract / p2
Contents / p3 1.Introduction / p4 2.Principle / p7 2.1 Surface Force / p9 2.2 Electrostatic Force / p10 2.3 Piezoelectric Effect / p12 3.Instrumentation / p14 3.1 Configuration / p14 3.2 Ultrasonic Motor for Tip Approach System / p16 3.3 Charge Control / p18 4.Experimental Results and Discussion / p20 4.1 Surface Force Detection / p20 4.2 Electrostatic Force Detection / p21 4.3 Surface Contour / p22 4.4 Defects Induced by Thermal Oxidation / p22 4.5 Ion-Implanted Silicon / p25 4.6 Contact Hole / p31 4.7 Piezoelectric Thin Film / p34 5.Conclusion / p40 Acknowledgements / p41 |
| SelfDOI | |
| language |
eng
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| nii type |
Thesis or Dissertation
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| HU type |
Doctoral Theses
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| DCMI type | text
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| format | application/pdf
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| text version | ETD
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| rights | Copyright(c) by Author
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| relation references | [1] Tunneling acoustic microscope. K. Takata, T. Hasegawa, S. Hosaka, S. Hosoki, and T. Komoda. Applied Physics Letters, Vol. 55, No. 17 (1989) pp. 1718-1720.
[2] Tunneling Acoustic Microscope. K. Takata, J. Yugami, T. Hasegawa, S. Hosaka, S. Hosoki, and T. Komoda. Japanese Journal of Applied Physics, Vol. 28, No. 12 (1989) pp. L2279-L2280.
[3] Electrostatic Force Imaging by Tunneling Acoustic Microscopy. K. Takata, T. Okawa, and M. Horiuchi. Japanese Journal of Applied Physics, Vol. 30, No. 2B (1991) pp. L309-L312.
[4] Observation of deep contact holes and conductive components underlying insulator in a memory cell by tunneling acoustic microscopy. K. Takata, T. Kure, and T. Okawa. Applied Physics Letters, Vol. 60, No. 4 (1992) pp. 515-517.
[5] Strain Imaging of Lead-Zirconate-Titanate Thin Film by Tunneling Acoustic Microscopy. K. Takata, K. Kushida, K. Torii, and H. Miki. Japanese Journal of Applied Physics, Vol. 33, No. 5B (1994) pp. 3193-3196.
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| relation references URL | http://dx.doi.org/10.1063/1.102199
http://dx.doi.org/10.1143/JJAP.28.L2279
http://dx.doi.org/10.1143/JJAP.30.L309
http://dx.doi.org/10.1063/1.106594
http://dx.doi.org/10.1143/JJAP.33.3193
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| grantid | 乙第2604号
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| degreeGrantor | 広島大学(Hiroshima University)
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| degreename Ja | 博士(理学)
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| degreename En | Physical Science
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| degreelevel | doctoral
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| date of granted | 1994-09-22
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| department |
Graduate School of Science
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