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ID 18592
本文ファイル
著者
Xu, Zhimou
Suzuki, Masato
Tanushi, Yuichiro
抄録(英)
Good-quality polycrystalline Ba0.7Sr0.3TiO3 (BST0.7) thin films were deposited on fused silica substrates and Si substrates having a thick amorphous SiO2 layer at a relatively low temperature of 550 °C by spin-coating metal organic solutions. The thin films were highly transparent to light in the ultraviolet to near-infrared wavelength regions. The optical propagation loss for a 5-μm-wide and 300-nm-thick polycrystalline waveguide based on BST0.7 was about 17 dB/cm at a wavelength of 632.8 nm. An electro-optic Mach-Zehnder interferometer modulator based on the polycrystalline BST0.7 thin film was monolithically integrated on a Si substrate with standard lithography and wet etching. Optical modulation was successfully demonstrated. The estimated electro-optic coefficient (6.7 pm/V) is the highest reported so far for this kind of film deposited on a fused silica substrate or a Si substrate with an amorphous SiO2 layer.
掲載誌名
Applied Physics Letters
88巻
17号
出版年月日
2006-04-17
出版者
American Institute of Physics
ISSN
0003-6951
NCID
出版者DOI
言語
英語
NII資源タイプ
学術雑誌論文
広大資料タイプ
学術雑誌論文
DCMIタイプ
text
フォーマット
application/pdf
著者版フラグ
publisher
権利情報
Copyright (c) 2006 American Institute of Physics.
関連情報URL
部局名
ナノデバイス・システム研究センター