ID 31853
file
title alternative
トンネル音響顕微鏡
creator
Tanaka, Keiji
NDC
Electrical engineering
abstract
This paper describes a new type of acoustic microscope based upon a scanning tunneling microscope (STM). This is an STM with an acoustic sensor that obtains physical information from an acoustic wave as well as the tunneling current. Interactions capable of generating strains in the STM sample are detectable and are used to image sample properties. This enhances STM's capabilities without reducing its ability, and enables imaging of nonconducting materials and imaging of dielectric and piezoelectric properties.
contents
Abstract / p2
Contents / p3
1.Introduction / p4
2.Principle / p7
 2.1 Surface Force / p9
 2.2 Electrostatic Force / p10
 2.3 Piezoelectric Effect / p12
3.Instrumentation / p14
 3.1 Configuration / p14
 3.2 Ultrasonic Motor for Tip Approach System / p16
 3.3 Charge Control / p18
4.Experimental Results and Discussion / p20
 4.1 Surface Force Detection / p20
 4.2 Electrostatic Force Detection / p21
 4.3 Surface Contour / p22
 4.4 Defects Induced by Thermal Oxidation / p22
 4.5 Ion-Implanted Silicon / p25
 4.6 Contact Hole / p31
 4.7 Piezoelectric Thin Film / p34
5.Conclusion / p40
Acknowledgements / p41
SelfDOI
language
eng
nii type
Thesis or Dissertation
HU type
Doctoral Theses
DCMI type
text
format
application/pdf
text version
ETD
rights
Copyright(c) by Author
relation references
[1] Tunneling acoustic microscope. K. Takata, T. Hasegawa, S. Hosaka, S. Hosoki, and T. Komoda. Applied Physics Letters, Vol. 55, No. 17 (1989) pp. 1718-1720.
[2] Tunneling Acoustic Microscope. K. Takata, J. Yugami, T. Hasegawa, S. Hosaka, S. Hosoki, and T. Komoda. Japanese Journal of Applied Physics, Vol. 28, No. 12 (1989) pp. L2279-L2280.
[3] Electrostatic Force Imaging by Tunneling Acoustic Microscopy. K. Takata, T. Okawa, and M. Horiuchi. Japanese Journal of Applied Physics, Vol. 30, No. 2B (1991) pp. L309-L312.
[4] Observation of deep contact holes and conductive components underlying insulator in a memory cell by tunneling acoustic microscopy. K. Takata, T. Kure, and T. Okawa. Applied Physics Letters, Vol. 60, No. 4 (1992) pp. 515-517.
[5] Strain Imaging of Lead-Zirconate-Titanate Thin Film by Tunneling Acoustic Microscopy. K. Takata, K. Kushida, K. Torii, and H. Miki. Japanese Journal of Applied Physics, Vol. 33, No. 5B (1994) pp. 3193-3196.
relation references URL
http://dx.doi.org/10.1063/1.102199
http://dx.doi.org/10.1143/JJAP.28.L2279
http://dx.doi.org/10.1143/JJAP.30.L309
http://dx.doi.org/10.1063/1.106594
http://dx.doi.org/10.1143/JJAP.33.3193
grantid
乙第2604号
degreeGrantor
広島大学(Hiroshima University)
degreename Ja
博士(理学)
degreename En
Physical Science
degreelevel
doctoral
date of granted
1994-09-22
department
Graduate School of Science